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51Technology / Silicon on insulator / Thermal oxidation / Ion implantation / Wafer / Microelectromechanical systems / Silicon on sapphire / Smart Cut / Epitaxy / Semiconductor device fabrication / Materials science / Microtechnology

JOURNAL OF APPLIED PHYSICS VOLUME 93, NUMBER 9

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Source URL: www.soitec.com

Language: English - Date: 2010-12-09 11:08:13
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